Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration
Huffman, Alan, Lannon, John, Lueck, Matthew, Gregory, Christopher, Temple, DorotaVolume:
4
Language:
english
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/4/03/p03006
Date:
March, 2009
File:
PDF, 948 KB
english, 2009