SPIE Proceedings [SPIE Microelectronics, MEMS, and...

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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Microelectronics: Design, Technology, and Packaging III - Mechanical properties measurement of silicon nitride thin films using the bulge test

Lee, Hun Kee, Ko, Seong Hyun, Han, Jun Soo, Park, HyunChul, Hariz, Alex J., Varadan, Vijay K.
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Volume:
6798
Year:
2007
Language:
english
DOI:
10.1117/12.759587
File:
PDF, 988 KB
english, 2007
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