Interconnecting Silicon Posts by Pyrolyzing Diffraction-Induced SU-8 Fibers
Zheng, Hui, Gao, Yang, Jiang, Shu Lan, Tang, Zi Rong, Shi, Tie Lin, Xia, QiVolume:
773
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.773.617
Date:
September, 2013
File:
PDF, 488 KB
english, 2013