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Linear micromechanical stepping drive for pinhole array positioning
Endrödy, Csaba, Mehner, Hannes, Grewe, Adrian, Hoffmann, MartinVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/5/055009
Date:
May, 2015
File:
PDF, 1.05 MB
english, 2015