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Simplified Cu/Polyimide Damascene Approach Based on Imprint Process of Soluble Block Copolymer Polyimide
Park, Sang-Cheon, Youn, Sung-Won, Hiroshima, Hiroshi, Takagi, Hideki, Maeda, Ryutaro, Kato, TakahisaVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.10MD03
Date:
October, 2013
File:
PDF, 827 KB
english, 2013