MOEMS-based lithography for the fabrication of...

MOEMS-based lithography for the fabrication of micro-optical components

Erdmann, Lars
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Volume:
4
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2114647
Date:
October, 2005
File:
PDF, 386 KB
english, 2005
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