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Combined effects of prepulsing and target geometry on efficient extreme ultraviolet production from laser produced plasma experiments and modeling
Hassanein, AhmedVolume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3609043
Date:
July, 2011
File:
PDF, 691 KB
english, 2011