Plasma-Etching Enhanced Mechanical Polishing for CVD Diamond Films
Xianfeng, Zheng, Zhibin, Ma, Zhenhui, Wu, Aihua, He, Jianhua, Wang, Songliu, YuanVolume:
10
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/10/3/13
Date:
June, 2008
File:
PDF, 433 KB
english, 2008