Acid-catalyzed single-layer resists for ArF lithography

Acid-catalyzed single-layer resists for ArF lithography

Kunz, Roderick R.
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Volume:
32
Year:
1993
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/12.145955
File:
PDF, 557 KB
english, 1993
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