Preparation and properties of polycrystalline silicon seed...

Preparation and properties of polycrystalline silicon seed layers on graphite substrate

Li, Ning, Chen, Nuofu, Bai, Yiming, He, Haiyang
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Volume:
33
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/33/11/113003
Date:
November, 2012
File:
PDF, 1.28 MB
english, 2012
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