SPIE Proceedings [SPIE SPIE Micro+Nano Materials, Devices, and Applications - Melbourne, Victoria, Australia (Sunday 8 December 2013)] Micro/Nano Materials, Devices, and Systems - Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films
Friend, James, Tan, H. Hoe, Brookshire, Kirsten L., Rafiei, Ramin, Martyniuk, Mariusz, Silva, K. K. M. B. Dilusha, Bumgarner, John, Basedow, Robert W., Liu, Yinong, Faraone, LorenzoVolume:
8923
Year:
2013
Language:
english
DOI:
10.1117/12.2033802
File:
PDF, 1.65 MB
english, 2013