Novel Structure of Double-H Tuning Fork for Dual-Axis...

Japanese Journal of Applied Physics 2013 / 09 Vol. 52; Iss. 9R

Novel Structure of Double-H Tuning Fork for Dual-Axis Quartz Micro-Electro-Mechanical System Angular Rate Sensor

Zhao, Ke, Feng, Lihui, Wang, Qianqian, Cui, Fang, Sun, Yunan
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.090207
Date:
September, 2013
File:
PDF, 665 KB
english, 2013
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