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Attachment Instabilities of SF 6 Inductively Coupled Plasmas under Different Coupling Intensities
Wei, Gao, Bin, Sun, Zhen-Feng, DingVolume:
26
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/26/6/065202
Date:
June, 2009
File:
PDF, 973 KB
english, 2009