A high-repetition-rate femtosecond laser for thin silicon wafer dicing
Venkatakrishnan, Krishnan, Sudani, Nitin, Tan, BoVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/7/075032
Date:
July, 2008
File:
PDF, 911 KB
english, 2008