Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effects
Ng, Philip C. W.Volume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3616043
Date:
July, 2011
File:
PDF, 4.88 MB
english, 2011