Smooth ceramic titanium nitride contacts on...

Semiconductor Science and Technology 2012 / 11 Vol. 27; Iss. 11

Smooth ceramic titanium nitride contacts on AlGaN/GaN-heterostructures

Maus, C, Stauden, T, Ecke, G, Tonisch, K, Pezoldt, J
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Volume:
27
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/27/11/115007
Date:
November, 2012
File:
PDF, 1.49 MB
english, 2012
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