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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Fabrication of microrelief surfaces using a one-step lithography process
Reimer, Klaus, Hofmann, Ulrich, Juerss, M., Pilz, Wolfgang, Quenzer, Hans Joachim, Wagner, Bernd, Motamedi, M. Edward, Herzig, Hans PeterVolume:
3226
Year:
1997
Language:
english
DOI:
10.1117/12.284557
File:
PDF, 1.88 MB
english, 1997