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Density functional theory study of the influence of segregation of S or Fe impurities on electromigration in nano-grained copper interconnects
Shabalin, M., Fuks, D.Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4919922
Date:
May, 2015
File:
PDF, 2.01 MB
english, 2015