Preparation of thermoelectric Si:B/SiGe multilayer structures on quartz glasses by RF-magnetron sputtering with layer-by-layer annealing methods
Ookura, Takuya, Toyota, Hideyuki, Takeda, Masatoshi, Kambayashi, Toshio, Uchitomi, NaotakaVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.087102
Date:
August, 2014
File:
PDF, 1.49 MB
english, 2014