Improvements in electrical properties of piezoelectric microcantilever sensors by reducing parasitic effects
Lee, Sangkyu, Lee, Yeolho, Lee, Haksue, Moon, WonkyuVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/8/085015
Date:
August, 2011
File:
PDF, 171 KB
english, 2011