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Oxygen Recovery in Hf Oxide Films Fabricated by Sputtering
Ran, Jiang, Zi-Feng, LiVolume:
26
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/26/5/057101
Date:
May, 2009
File:
PDF, 659 KB
english, 2009