Water Absorption Properties of Fluorine-Doped...

Japanese Journal of Applied Physics 1996 / 12 Vol. 35; Iss. Part 1, No

Water Absorption Properties of Fluorine-Doped S i O 2 Films Using Plasma-Enhanced Chemical Vapor Deposition

Miyajima, Hideshi, Katsumata, Ryota, Nakasaki, Yasushi, Nishiyama, Yukio, Hayasaka, Nobuo
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.35.6217
Date:
December, 1996
File:
PDF, 425 KB
english, 1996
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