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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Role of laser pulse duration and ambient nitrogen pressure in deposition of AlN thin films
Ristoscu, Carmen, Dorcioman, Corina Gabriela, Socol, Gabriel, Mihailescu, Ion N., Klini, Agryro, Fotakis, Costas, Vlad, Valentin I.Year:
2012
Language:
english
DOI:
10.1117/12.582815
File:
PDF, 553 KB
english, 2012