The Properties of the Rectangular Arc Ion Plating with...

The Properties of the Rectangular Arc Ion Plating with Magnetic Filtering Shutter

Zhongbing, Shi, Honghui, Tong, Xiaobo, Liu, Tao, Xiong, Yong, Li, Fuxiu, Yan, Yan, Zhao, Zuogui, Yang
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Volume:
6
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/6/6/013
Date:
December, 2004
File:
PDF, 482 KB
english, 2004
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