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The Properties of the Rectangular Arc Ion Plating with Magnetic Filtering Shutter
Zhongbing, Shi, Honghui, Tong, Xiaobo, Liu, Tao, Xiong, Yong, Li, Fuxiu, Yan, Yan, Zhao, Zuogui, YangVolume:
6
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/6/6/013
Date:
December, 2004
File:
PDF, 482 KB
english, 2004