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SPIE Proceedings [SPIE Metal/Nonmetal Microsystems: Physics, Technology, and Applications - Polanica Zdroj, Poland (Monday 11 September 1995)] Metal/Nonmetal Microsystems: Physics, Technology, and Applications - Equipment for investigation of electronic devices with voltage contrast technique in SEM
Drzazga, Wlodzimierz, Klubinski, G., Slowko, W., Licznerski, Benedykt W., Dziedzic, AndrzejVolume:
2780
Year:
1996
Language:
english
DOI:
10.1117/12.238137
File:
PDF, 321 KB
english, 1996