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Design and fabrication of a terminating type MEMS microwave power sensor
Yinglin, Xu, Xiaoping, LiaoVolume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/4/044010
Date:
April, 2009
File:
PDF, 321 KB
english, 2009