SPIE Proceedings [SPIE Optical Science and Technology,...

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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Lithographic and Micromachining Techniques for Optical Component Fabrication II - Resonant grating filters at oblique incidence

Niederer, Guido, Salt, Martin, Herzig, Hans Peter, Thiele, Hans, Gale, Michael T., Zschokke, Christian, Schnieper, Marc, Kley, Ernst-Bernhard, Herzig, Hans Peter
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Volume:
5183
Year:
2003
Language:
english
DOI:
10.1117/12.512221
File:
PDF, 186 KB
english, 2003
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