Influence of nitrogen dose on the charge density of...

Influence of nitrogen dose on the charge density of nitrogen-implanted buried oxide in SOI wafers

Zhongshan, Zheng, Zhongli, Liu, Ning, Li, Guohua, Li, Enxia, Zhang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
31
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/31/2/026001
Date:
February, 2010
File:
PDF, 316 KB
english, 2010
Conversion to is in progress
Conversion to is failed