SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Microfluidics, BioMEMS, and Medical Microsystems X - Hybrid membrane-microfluidic components using a novel ceramic MEMS technology
Lutz, Brent J., Becker, Holger, Gray, Bonnie L., Polyakov, Oleg, Rinaldo, ChrisVolume:
8251
Year:
2012
Language:
english
DOI:
10.1117/12.908878
File:
PDF, 1.80 MB
english, 2012