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SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications
González-Castilla, Sheila, Schmid, Ulrich, Olivares, Jimena, Clement, Marta, Vergara, Lucía, Pulido, Laura, Iborra, Enrique, Sangrador, JesúsVolume:
7362
Year:
2009
Language:
english
DOI:
10.1117/12.821485
File:
PDF, 840 KB
english, 2009