Automatic recognition of circuit patterns on semiconductor...

Measurement Science and Technology 2010 / 08 Vol. 21; Iss. 8

Automatic recognition of circuit patterns on semiconductor wafers from multiple scanning electron microscope images

Nakagaki, Ryo, Takagi, Yuji, Nakamae, Koji
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Volume:
21
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/21/8/085501
Date:
August, 2010
File:
PDF, 730 KB
english, 2010
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