Reactive ion etching of Ti-diffused LiNbO 3...

Journal of Semiconductors 2013 / 08 Vol. 34; Iss. 8

Reactive ion etching of Ti-diffused LiNbO 3 slab waveguides

Wu, Jianjie, Li, Jinyang, Yao, Yanqing, Qi, Zhimei
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Volume:
34
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/34/8/086001
Date:
August, 2013
File:
PDF, 1.21 MB
english, 2013
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