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[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - In-plane comb-drive actuator with high frequency-displacement product for micro-optical bench applications
Eltagoury, Yomna M., Soliman, Mostafa, Al-Otaibi, Mohammed, Sabry, Yasser M., Sadek, Mohamed, Khalil, DiaaYear:
2014
Language:
english
DOI:
10.1109/OMN.2014.6924568
File:
PDF, 286 KB
english, 2014