[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Resonant PZT MEMS scanners with integrated angle sensors
Baran, Utku, Holmstrom, Sven, Brown, Dean, Davis, Wyatt, Cakmak, Onur, Urey, HakanYear:
2014
Language:
english
DOI:
10.1109/OMN.2014.6924612
File:
PDF, 311 KB
english, 2014