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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - High-k Gate Stack: Improved Reliability through Process Clustering
Graoui, Houda, Hung, Steven C., Kanan, B., Curtis, R., Bevan, M., Liu, P., Noori, A., Chu, D., Mcdougal, B., Ni, C. N., Chan, O., Date, L., Borniquel, J., Swenberg, J., Mahajani, M.Year:
2010
Language:
english
DOI:
10.1149/1.3485276
File:
PDF, 255 KB
english, 2010