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Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of Nanocrystalline Silicon Films in Hot-Filament Chemical Vapor Deposition
Guo, Xiao-Song, Zhang, Shan-Shan, Bao, Zhong, Zhang, Hong-Liang, Chen, Chang-Cheng, Liu, Li-Xin, Liu, Yan-Xia, Xie, Er-QingVolume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/2/028103
Date:
February, 2011
File:
PDF, 1.04 MB
english, 2011