The etching of a -plane GaN...

Chinese Physics B 2010 / 10 Vol. 19; Iss. 10

The etching of a -plane GaN epilayers grown by metal-organic chemical vapour deposition

Sheng-Rui, Xu, Yue, Hao, Jin-Cheng, Zhang, Xiao-Wei, Zhou, Yan-Rong, Cao, Xin-Xiu, Ou, Wei, Mao, Da-Chao, Du, Hao, Wang
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Volume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/10/107204
Date:
October, 2010
File:
PDF, 648 KB
english, 2010
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