Influence of working gas pressure on the performance of W/Si multilayers
Wang, Fang-Fang, Zhu, Jing-Tao, Zhong, Qi, Wang, Zhan-Shan, Jonnard, Philippe, Guen, Karine Le, André, Jean-Michel, Fialin, MichelVolume:
36
Language:
english
Journal:
Chinese Physics C
DOI:
10.1088/1674-1137/36/9/021
Date:
September, 2012
File:
PDF, 6.68 MB
english, 2012