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Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F 2- lasers
Basiev, Tasoltan T, Karasik, Aleksandr Ya, Osiko, Vyacheslav V, Papashvili, A G, Chunaev, D S, Gavrilov, A V, Ershkov, M N, Smetanin, S N, Solokhin, S A, Fedin, A V, Kolokol'tsev, V N, Lazorenko, V M,Volume:
39
Language:
english
Journal:
Quantum Electronics
DOI:
10.1070/QE2009v039n04ABEH013909
Date:
April, 2009
File:
PDF, 207 KB
english, 2009