Investigation of Ion-Impantation Induced Damage in 6H-SiC...

Materials Science Forum 1998 Vol. 264-268

Investigation of Ion-Impantation Induced Damage in 6H-SiC by RSB/C and PAS

Wirth, H., Anwand, W., Brauer, Gerhard, Voelskow, M., Panknin, D., Skorupa, Wolfgang, Coleman, Paul G.
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.729
File:
PDF, 298 KB
1998
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