Nickel-disilicide-assisted excimer laser crystallization of amorphous silicon
Yan-Ping, Liao, Xi-Bin, Shao, Feng-Li, Gao, Wen-Sheng, Luo, Yuan, Wu, Guo-Zhu, Fu, Hai, Jing, Kai, MaVolume:
15
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/15/6/029
Date:
June, 2006
File:
PDF, 650 KB
english, 2006