Fabrication of tri-gated junctionless poly-Si transistors with I-line based lithography
Lin, Cheng-I, Lee, Ko-Hui, Lin, Horng-Chih, Huang, Tiao-YuanVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.04EA01
Date:
January, 2014
File:
PDF, 82 KB
english, 2014