Investigation of an a-Si/c-Si interface on a c-Si(P)...

Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation

Wang, Jianqiang, Gao, Hua, Zhang, Jian, Meng, Fanying, Ye, Qinghao
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Volume:
33
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/33/3/033001
Date:
March, 2012
File:
PDF, 721 KB
english, 2012
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