Fabrication and characterization of a design optimized SU-8...

Measurement Science and Technology 2009 / 11 Vol. 20; Iss. 11

Fabrication and characterization of a design optimized SU-8 thermopile with enhanced sensitivity

Mattsson, C G, Thungström, G, Bertilsson, K, Nilsson, H-E, Martin, H
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Volume:
20
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/20/11/115202
Date:
November, 2009
File:
PDF, 493 KB
english, 2009
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