![](/img/cover-not-exists.png)
Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography
Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, JunVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/8/085004
Date:
August, 2011
File:
PDF, 525 KB
english, 2011