Fabrication and Noise Reduction of the Miniature Tactile...

Japanese Journal of Applied Physics 2013 / 06 Vol. 52; Iss. 6S

Fabrication and Noise Reduction of the Miniature Tactile Sensor Using Through-Silicon-Via Connection with Signal Amplifier

Yokoyama, Hokuto, Sohgawa, Masayuki, Kanashima, Takeshi, Azuma, Teruaki, Okuyama, Masanori, Noma, Haruo
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.06GL08
Date:
June, 2013
File:
PDF, 1.01 MB
english, 2013
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