Resist footing variation and compensation over nonplanar...

Journal of Micro/Nanolithography MEMS and MOEMS 2004 / 07 Vol. 3; Iss. 3

Resist footing variation and compensation over nonplanar wafer

Sato, Takashi
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Volume:
3
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.1759327
Date:
July, 2004
File:
PDF, 651 KB
english, 2004
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