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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Stiction-free release etch with anhydrous HF/water vapor processes
Hanestad, Ron, Butterbaugh, Jeffery W., ben-Hamida, Abdselem, Gelmi, Ilaria, Karam, Jean Michel, Yasaitis, John A.Volume:
4557
Year:
2001
Language:
english
DOI:
10.1117/12.442986
File:
PDF, 752 KB
english, 2001