Ion Implantation Effects of Microcrystalline and...

Japanese Journal of Applied Physics 2004 / 12 Vol. 43; Iss. 12

Ion Implantation Effects of Microcrystalline and Nanocrystalline Diamond Thin Films

Narayanan, Kannan L, Soga, Tetsuo, Tokunaga, Tomoharu, Yamaguchi, Masafumi
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.7971
Date:
December, 2004
File:
PDF, 256 KB
english, 2004
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