Two-dimensional particle-in-cell plasma source ion...

Chinese Physics B 2010 / 03 Vol. 19; Iss. 3

Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target

Cheng-Sen, Liu, Hong-Ying, Han, Xiao-Qing, Peng, Ye, Chang, De-Zhen, Wang
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Volume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/3/035201
Date:
March, 2010
File:
PDF, 1.17 MB
english, 2010
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